Willson Research Group

The University of Texas at Austin

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• Willson
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• Research

Tutorials

Ellipsometry
• Lithography (Chris Mack on lithoguru.com)
• Step and Flash Imprint Lithography

Active Research Areas

• Biochip
• Double Exposure Lithography
• E-Beam Resists
• Immersion Lithography
• Imprint Template Process
• Interfacial Adhesion Studies
• Pillars
• Planarization
• Resist Modeling
• Reversible Polymers
• RIE of Polymers
• SFIL Filling Dynamics
• SFIL Modeling